ELECTRON MICROSCOPE APPLICATION DEVICE, AND TESTPIECE INSPECTION METHOD

PROBLEM TO BE SOLVED: To provide a technology of enabling to control charge of a testpiece in an electron microscope application device and a testpiece inspecting method. SOLUTION: This has a structure in which a charge control electrode 4 to emit photoelectrons 2 is arranged directly on a wafer 3 (...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SATO MITSUGI, MAKINO HIROSHI, KOYAMA HIKARI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!