METHOD FOR MANUFACTURING FLASH MEMORY DEVICE

PROBLEM TO BE SOLVED: To provide a method of manufacturing a flash memory device which can improve charge retention characteristics of the flash memory device, and can prevent a smiling phenomenon of a tunnel oxide film and a dielectric film which are generated after a thermal treatment process of a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEE SEUNGOL, SONG PIL-GEUN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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