METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND RESULTING DEVICE

PROBLEM TO BE SOLVED: To provide a method for manufacturing a device, which is a semiconductor device, especially a high frequency and high power device having a plurality of gates formed like fingers, such as HEMT, and is smaller than a well-known air bridge structure, and is required to be high in...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DAS JOHAN, RUYTHOOREN WOUTER
Format: Patent
Sprache:eng
Schlagworte:
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