FUNCTIONAL ELEMENT AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To reduce cost by miniaturizing a chip size and improving defect rate with simple process. SOLUTION: Many pieces of chip elements 3 and wiring patterns 7 are formed on a wafer 30, and the wafer is diced after a cap substrate 4 is mounted opposed to each chip element through a j...

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Bibliographische Detailangaben
1. Verfasser: OYA YOICHI
Format: Patent
Sprache:eng
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