ARTICLE CARRYING ROBOT AND CLEAN CARRIER SYSTEM

PROBLEM TO BE SOLVED: To carry articles without contamination with dust etc., even if an article carrying passage is not kept in a specially clean environment. SOLUTION: There is provided an article carrying robot 16 which grips the article 20 received from one clean area 10 via a pass box 22, by a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAMIYA MATSUO, KINOSHITA MASAFUMI
Format: Patent
Sprache:eng
Schlagworte:
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