MANUFACTURING METHOD OF ELECTRO-OPTICAL APPARATUS

PROBLEM TO BE SOLVED: To provide a manufacturing method of an electro-optical apparatus, having high writing speed of a data signal and superior display characteristics by preventing increase in the contact resistance of the electro-optical apparatus provided with a prescribed element structure. SOLUTION: The manufacturing method of the electro-optical apparatus having an overlayer structure provided with the prescribed element structure includes a step of forming a patterned tantalum layer on a substrate, a step of forming a tantalum oxide layer by oxidizing the surface of the tantalum layer, a step of forming a patterned chromium layer so as to be superimposed on a part of the tantalum oxide layer, a step of subjecting the substrate, on which the chromium layer is formed to heat treatment in an inert gas, a step of forming an interlayer insulating layer so that a contact hole is disposed at a position superimposed on the chromium layer and a step of forming a pixel electrode, consisting of a conductive layer so as to be electrically connected to the chromium layer via the contact hole. COPYRIGHT: (C)2006,JPO&NCIPI