EXPOSURE DEVICE, EXPOSURE AMOUNT CONTROL METHOD, EXPOSURE AMOUNT CONTROL PROGRAM AND RECORDING MEDIUM THEREOF

PROBLEM TO BE SOLVED: To provide an exposure device capable of suitably controlling a cumulative exposure amount to a substrate, even if the measurement precision of light volume detection means for controlling an exposure amount is deteriorated. SOLUTION: There are provided an integrator 21 detecti...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KITO TSUNANORI, OKAMOTO HIROSHI, TAGUSA YASUNOBU
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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