PLANAR MOTOR AND INITIALIZATION METHOD THEREOF, LITHOGRAPHY DEVICE, AND DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide an initialization method for initializing a planar motor, without requiring additional determination systems. SOLUTION: In the planar motor for supplying a three-phase AC to a coil assembly 2 facing a magnetic plate 12, having an alternating magnetic pole on the surf...

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Hauptverfasser:	HOL SVEN ANTOIN J, COX HENRIKUS HERMAN MARIE, SIMONS WILHELMUS FRANCISCUS J
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DYNAMO-ELECTRIC MACHINES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERATION HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an initialization method for initializing a planar motor, without requiring additional determination systems. SOLUTION: In the planar motor for supplying a three-phase AC to a coil assembly 2 facing a magnetic plate 12, having an alternating magnetic pole on the surface, the commutation offset angle of current, flowing in respective coils 2, 4, 6 for deciding the direction of force generated by the current of a magnetic field, is decided by determining the time the force to be generated is led vertically to the magnetic plate 12; while the force to be generated is made so as not to exceed the horizontal frictional force. Alternatively, when the force to be generated is led vertical to the magnetic plate can be decided, by deciding the maximum compression or the maximum pressure of an end stop 22 of the coil assembly 2. COPYRIGHT: (C)2006,JPO&NCIPI