SYSTEM FOR COLORING PARTIALLY COLORED DESIGN IN LEVENSON TYPE PHASE SHIFT MASK

PROBLEM TO BE SOLVED: To provide an improved method for designing an Levenson type phase shifting mask with which the phase shape collision within a design layout can be solved. SOLUTION: The method of designing the Lvenson type phase shifting mask for projecting an image of an integrated circuit de...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YANG O KIM, LAAS W LIEBMANN, GRAUR IOANA, MARK A RABIN
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CALCULATING CINEMATOGRAPHY COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!