PLANE SERVO MOTOR DEVICE AND ITS CONTROL METHOD

PROBLEM TO BE SOLVED: To provide a plane servo motor device which can execute highly precise positioning and is highly stable against disturbances. SOLUTION: The plane servo motor comprises a forcer 3 and a platen 1. The forcer 3 includes two X-shaft motors provided in an X-shaft direction, two Y-shaft motors provided in a Y-shaft direction, a motor drive unit paired with each motor, and an air ejection port for ejecting air from a bottom surface part. The platen 1 is obtained by connecting a plurality of platens, a two-dimensional encoder scale 2 is provided between the platen and the forcer, and one encoder head 4 obtaining a position signal for one set of a motor and a drive unit is provided to the forcer by joining a plurality of the two-dimensional encoder scales. COPYRIGHT: (C)2006,JPO&NCIPI