SHEET-LIKE OBJECT DRYING METHOD AND DEVICE, SHEET-LIKE OBJECT WASHING METHOD AND DEVICE, AND FOREIGN MATTER REMOVING METHOD AND DEVICE FOR SHEET-LIKE OBJECT

PROBLEM TO BE SOLVED: To provide a foreign matter removing method for a plurality of sheet-like objects capable of easily and efficiently removing foreign matters from the plurality of sheet-like objects. SOLUTION: In this foreign matter removing method for the sheet-like objects, the plurality of s...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: YAMAMOTO KAZUTADA, HARA TETSUYA
Format: Patent
Sprache:eng
Schlagworte:
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