FINE PROCESSING METHOD AND FINE PROCESSING DEVICE

PROBLEM TO BE SOLVED: To provide a fine processing method for manufacturing a thin-film workpiece with high processing accuracy; and to provide its device. SOLUTION: A processing cross-sectional surface 10 of a workpiece 4 is formed on an ion beam-irradiated side surface 26 obtained by moving a radi...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	INUI MITSUTAKA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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