FINE PROCESSING METHOD AND FINE PROCESSING DEVICE

PROBLEM TO BE SOLVED: To provide a fine processing method for manufacturing a thin-film workpiece with high processing accuracy; and to provide its device. SOLUTION: A processing cross-sectional surface 10 of a workpiece 4 is formed on an ion beam-irradiated side surface 26 obtained by moving a radi...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: INUI MITSUTAKA
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator INUI MITSUTAKA
description PROBLEM TO BE SOLVED: To provide a fine processing method for manufacturing a thin-film workpiece with high processing accuracy; and to provide its device. SOLUTION: A processing cross-sectional surface 10 of a workpiece 4 is formed on an ion beam-irradiated side surface 26 obtained by moving a radiation axis 24 of an ion beam 20 along a processing line. An image of an object 8 located in the workpiece 4 is captured by radiating an electron beam 30. Images of first and second parts in the captured image are compared with each other to determine which of the thickness of a covering part 16 from the processing cross-sectional surface 10 to the surface of the first part and the thickness of a covering part 16 from the processing cross-sectional surface 10 to the surface of the second part is larger. At least either of the direction of the processing line and the angle of the radiation axis 24 is changed so that the ion beam-irradiated side surface 26 significantly approaches a direction toward the other side out of the first and second parts where the covering part 16 is thicker rather than a direction toward one side where the covering part 16 is thinner. The workpiece 4 is processed again by moving the processing line. COPYRIGHT: (C)2006,JPO&NCIPI
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2005317330A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2005317330A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2005317330A3</originalsourceid><addsrcrecordid>eNrjZDB08_RzVQgI8nd2DQ729HNX8HUN8fB3UXD0c1FAl3JxDfN0duVhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGBqbGhubGxgaOxkQpAgCIjCa-</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>FINE PROCESSING METHOD AND FINE PROCESSING DEVICE</title><source>esp@cenet</source><creator>INUI MITSUTAKA</creator><creatorcontrib>INUI MITSUTAKA</creatorcontrib><description>PROBLEM TO BE SOLVED: To provide a fine processing method for manufacturing a thin-film workpiece with high processing accuracy; and to provide its device. SOLUTION: A processing cross-sectional surface 10 of a workpiece 4 is formed on an ion beam-irradiated side surface 26 obtained by moving a radiation axis 24 of an ion beam 20 along a processing line. An image of an object 8 located in the workpiece 4 is captured by radiating an electron beam 30. Images of first and second parts in the captured image are compared with each other to determine which of the thickness of a covering part 16 from the processing cross-sectional surface 10 to the surface of the first part and the thickness of a covering part 16 from the processing cross-sectional surface 10 to the surface of the second part is larger. At least either of the direction of the processing line and the angle of the radiation axis 24 is changed so that the ion beam-irradiated side surface 26 significantly approaches a direction toward the other side out of the first and second parts where the covering part 16 is thicker rather than a direction toward one side where the covering part 16 is thinner. The workpiece 4 is processed again by moving the processing line. COPYRIGHT: (C)2006,JPO&amp;NCIPI</description><edition>7</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CLADDING OR PLATING BY SOLDERING OR WELDING ; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; MACHINE TOOLS ; METAL-WORKING NOT OTHERWISE PROVIDED FOR ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; SOLDERING OR UNSOLDERING ; TRANSPORTING ; WELDING ; WORKING BY LASER BEAM</subject><creationdate>2005</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20051110&amp;DB=EPODOC&amp;CC=JP&amp;NR=2005317330A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20051110&amp;DB=EPODOC&amp;CC=JP&amp;NR=2005317330A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>INUI MITSUTAKA</creatorcontrib><title>FINE PROCESSING METHOD AND FINE PROCESSING DEVICE</title><description>PROBLEM TO BE SOLVED: To provide a fine processing method for manufacturing a thin-film workpiece with high processing accuracy; and to provide its device. SOLUTION: A processing cross-sectional surface 10 of a workpiece 4 is formed on an ion beam-irradiated side surface 26 obtained by moving a radiation axis 24 of an ion beam 20 along a processing line. An image of an object 8 located in the workpiece 4 is captured by radiating an electron beam 30. Images of first and second parts in the captured image are compared with each other to determine which of the thickness of a covering part 16 from the processing cross-sectional surface 10 to the surface of the first part and the thickness of a covering part 16 from the processing cross-sectional surface 10 to the surface of the second part is larger. At least either of the direction of the processing line and the angle of the radiation axis 24 is changed so that the ion beam-irradiated side surface 26 significantly approaches a direction toward the other side out of the first and second parts where the covering part 16 is thicker rather than a direction toward one side where the covering part 16 is thinner. The workpiece 4 is processed again by moving the processing line. COPYRIGHT: (C)2006,JPO&amp;NCIPI</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CLADDING OR PLATING BY SOLDERING OR WELDING</subject><subject>CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>MACHINE TOOLS</subject><subject>METAL-WORKING NOT OTHERWISE PROVIDED FOR</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</subject><subject>SOLDERING OR UNSOLDERING</subject><subject>TRANSPORTING</subject><subject>WELDING</subject><subject>WORKING BY LASER BEAM</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2005</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDB08_RzVQgI8nd2DQ729HNX8HUN8fB3UXD0c1FAl3JxDfN0duVhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGBqbGhubGxgaOxkQpAgCIjCa-</recordid><startdate>20051110</startdate><enddate>20051110</enddate><creator>INUI MITSUTAKA</creator><scope>EVB</scope></search><sort><creationdate>20051110</creationdate><title>FINE PROCESSING METHOD AND FINE PROCESSING DEVICE</title><author>INUI MITSUTAKA</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2005317330A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2005</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CLADDING OR PLATING BY SOLDERING OR WELDING</topic><topic>CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>MACHINE TOOLS</topic><topic>METAL-WORKING NOT OTHERWISE PROVIDED FOR</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</topic><topic>SOLDERING OR UNSOLDERING</topic><topic>TRANSPORTING</topic><topic>WELDING</topic><topic>WORKING BY LASER BEAM</topic><toplevel>online_resources</toplevel><creatorcontrib>INUI MITSUTAKA</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>INUI MITSUTAKA</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>FINE PROCESSING METHOD AND FINE PROCESSING DEVICE</title><date>2005-11-10</date><risdate>2005</risdate><abstract>PROBLEM TO BE SOLVED: To provide a fine processing method for manufacturing a thin-film workpiece with high processing accuracy; and to provide its device. SOLUTION: A processing cross-sectional surface 10 of a workpiece 4 is formed on an ion beam-irradiated side surface 26 obtained by moving a radiation axis 24 of an ion beam 20 along a processing line. An image of an object 8 located in the workpiece 4 is captured by radiating an electron beam 30. Images of first and second parts in the captured image are compared with each other to determine which of the thickness of a covering part 16 from the processing cross-sectional surface 10 to the surface of the first part and the thickness of a covering part 16 from the processing cross-sectional surface 10 to the surface of the second part is larger. At least either of the direction of the processing line and the angle of the radiation axis 24 is changed so that the ion beam-irradiated side surface 26 significantly approaches a direction toward the other side out of the first and second parts where the covering part 16 is thicker rather than a direction toward one side where the covering part 16 is thinner. The workpiece 4 is processed again by moving the processing line. COPYRIGHT: (C)2006,JPO&amp;NCIPI</abstract><edition>7</edition><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_JP2005317330A
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
CLADDING OR PLATING BY SOLDERING OR WELDING
CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MACHINE TOOLS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
SOLDERING OR UNSOLDERING
TRANSPORTING
WELDING
WORKING BY LASER BEAM
title FINE PROCESSING METHOD AND FINE PROCESSING DEVICE
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T18%3A18%3A42IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=INUI%20MITSUTAKA&rft.date=2005-11-10&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2005317330A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true