ILLUMINATING OPTICAL DEVICE, ALIGNER, AND EXPOSURE METHOD

PROBLEM TO BE SOLVED: To provide an illuminating optical device which can provide illumination conditions which are highly diverse regarding proper illumination conditions such as a secondary light source shape, light intensity and polarization state required for transferring a mask pattern with var...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	NISHINAGA HISASHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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