SURFACE PROTECTION FILM FORMATION METHOD FOR REPAIRING TOOL FOR HEAT TREATMENT AND REPAIRING TOOL FOR HEAT TREATMENT

PROBLEM TO BE SOLVED: To provide the surface protection film formation method of a preparing tool for heat treatment for forming the SiC film of a plurality of layers on the surface of a repairing tool for heat treatment so as to sufficiently decrease impurity concentration in the SiC film, especial...

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Bibliographische Detailangaben

Hauptverfasser:	KIMURA AKIHIRO, MIZUNO MICHIHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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