GASEOUS FLUORINE GENERATOR

PROBLEM TO BE SOLVED: To provide a gaseous fluorine generator capable of stopping damages in abnormal conditions to the minimum. SOLUTION: The gaseous fluorine generator 30 comprises an electrolytic cell 32 generating a product gas including gaseous fluorine as the main component at the primary vapor phase part on the anode side and generating a by-produced gas including gaseous hydrogen as the main component at the second vapor phase part on the cathode side. First piping 52 and second piping 72 are arranged for leading-out the product gas and by-produced gas. A leading-out flow rate control part 74 controlling the flow rate of the by-produced gas to be led out is arranged at the second piping 72. A first dilution pipe 82 introducing an inert gas so as to control the concentration of hydrogen in the gas at the second vapor phase part on the cathode side to 70 to 10% is arranged. A second dilution pipe 84 introducing an inert gas into the second piping 72 so as to control the concentration of hydrogen in the gas discharged from the second piping 72 to ≤4% is arranged at the stream lower than the leading-out flow rate control part 74. COPYRIGHT: (C)2005,JPO&NCIPI