CHEMICAL SOLUTION FEEDING SYSTEM FOR MANUFACTURING LIQUID CRYSTAL DISPLAY

PROBLEM TO BE SOLVED: To provide a chemical solution feeding system capable of controlling a chemical solution to be injected to a large-sized substrate at a constant temperature. SOLUTION: The chemical solution feeding system comprises a chemical solution supplying device for supplying the chemical...

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Hauptverfasser:	KIM JIN-SU, KYO SEITETSU, CHO HONG JE
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS NOZZLES OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PERFORMING OPERATIONS PHYSICS SEMICONDUCTOR DEVICES SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a chemical solution feeding system capable of controlling a chemical solution to be injected to a large-sized substrate at a constant temperature. SOLUTION: The chemical solution feeding system comprises a chemical solution supplying device for supplying the chemical solution, a first temperature controlling device for controlling the temperature of the chemical solution in the chemical solution supplying device, a plurality of nozzles 80 for injecting the chemical solution supplied by the chemical solution supplying device to the substrate, a chemical solution delivery tube 31 for delivering the chemical solution from the chemical solution supplying device to the nozzles, and a second temperature controlling device 50 for controlling the temperature of the chemical solution flowing through the chemical solution delivery tube. COPYRIGHT: (C)2005,JPO&NCIPI