ENVIRONMENT CONTROL DEVICE

ENVIRONMENT CONTROL DEVICE

PROBLEM TO BE SOLVED: To provide an environment control device capable of improving processing accuracy by keeping the atmosphere around a flat processed member at a good environmental value. SOLUTION: A supply port 29 and an exhaust port 27 connected with a gas environmental value adjusting machine...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: HATORI KOICHI
Format: Patent
Sprache:eng
Schlagworte:
AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
RANGES
VENTILATING
WEAPONS
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide an environment control device capable of improving processing accuracy by keeping the atmosphere around a flat processed member at a good environmental value. SOLUTION: A supply port 29 and an exhaust port 27 connected with a gas environmental value adjusting machine 31, are formed on one side wall of a chamber 25 accommodating a processor 21, an internal partitioning wall 37 is mounted in the chamber 25 for guiding the gas supplied from the supply port 29 to an exhaust port 27 side along a ceiling wall 25a, a blowout port 41 is formed at an outlet end side of the internal partitioning wall 37 in a state of being faced to the exhaust port 27, and the flat laminar airflow is formed around the flat processed member 33 in the chamber 25. COPYRIGHT: (C)2005,JPO&NCIPI