EVALUATION METHOD AND EVALUATING APPARATUS FOR CRYSTAL DEFECT IN ARTIFICIAL CRYSTAL

PROBLEM TO BE SOLVED: To provide a method and an apparatus for easily and quickly evaluating defects in an artificial crystal without destruction of it. SOLUTION: Crystal defects in an artificial crystal are precisely, non-destructively, and easily detected, and the quality of an artificial crystal ore object to be inspected can be evaluated by observing the shape of cobbles in detail by using the irradiation of visible rays and ultraviolet rays since linear defect density and cobble density in the crystal are in a proportional relationship. Additionally, the density of the cobbles on a Z surface in the artificial crystal ore object to be inspected is measured, the measurement value is compared with the correlation data of the linear defect density to the cobble density, and the linear defect density of the object to be inspected is evaluated for achieving the aim. COPYRIGHT: (C)2005,JPO&NCIPI