SUBSTRATE DRYING EQUIPMENT

PROBLEM TO BE SOLVED: To enable adjusting capacity of mist by water-soluble organic solvent, and miniaturize the whole equipment without arranging a mist spraying apparatus in a drying room. SOLUTION: The substrate drying equipment is provided with a processing tank 81 which stores deionized water a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TSUJI HIROKI, SHIMADA KIYOSHI, NOBATA HIROYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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