OPTOELECTRONIC MICROSYSTEM, WAVEGUIDE ELEMENT, VARIABLE WELL OPTICAL IC AND OPTOELECTRONIC MICRO/NANOSYSTEM

PROBLEM TO BE SOLVED: To realize a microfabrication of a wiring of an optoelectronic microsystem. SOLUTION: The optoelectronic microsystem is provided with thin film integrated circuits and optical elements. Electric wiring which connects the circuits and the elements has a mutilayered wiring structure. Thus, the circuits and the elements are linked by the structure and finer wiring is realized. The optical elements include a semiconductor laser, a photodetector, an optical switch, a variable wavelength filter, an optical memory, an optical amplifier, a photonic crystal and a bioelement or the like. COPYRIGHT: (C)2005,JPO&NCIPI