LAMINATING SYSTEM

PROBLEM TO BE SOLVED: To enhance the quality of a laminated substrate by solving a problem that the lamination strength deteriorates or the yield decreases due to organic atmosphere of particle organic solvent from a second system or a worker. SOLUTION: The laminating system comprises a unit for pro...

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Hauptverfasser: YAMAGATA KENJI, YANAGIDA KAZUTAKA
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creator YAMAGATA KENJI
YANAGIDA KAZUTAKA
description PROBLEM TO BE SOLVED: To enhance the quality of a laminated substrate by solving a problem that the lamination strength deteriorates or the yield decreases due to organic atmosphere of particle organic solvent from a second system or a worker. SOLUTION: The laminating system comprises a unit for processing the surface of first and second substrates, an operating unit for overlaying the first and second substrates, and a chamber 201 for containing the processing unit and the operating unit and isolating them from the external space. Processing of the first and second substrates by the processing unit includes cleaning and/or activating the surface of the second substrate. COPYRIGHT: (C)2004,JPO&NCIPI
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title LAMINATING SYSTEM
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