LAMINATING SYSTEM

PROBLEM TO BE SOLVED: To enhance the quality of a laminated substrate by solving a problem that the lamination strength deteriorates or the yield decreases due to organic atmosphere of particle organic solvent from a second system or a worker. SOLUTION: The laminating system comprises a unit for pro...

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Bibliographische Detailangaben
Hauptverfasser:	YAMAGATA KENJI, YANAGIDA KAZUTAKA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To enhance the quality of a laminated substrate by solving a problem that the lamination strength deteriorates or the yield decreases due to organic atmosphere of particle organic solvent from a second system or a worker. SOLUTION: The laminating system comprises a unit for processing the surface of first and second substrates, an operating unit for overlaying the first and second substrates, and a chamber 201 for containing the processing unit and the operating unit and isolating them from the external space. Processing of the first and second substrates by the processing unit includes cleaning and/or activating the surface of the second substrate. COPYRIGHT: (C)2004,JPO&NCIPI