SAFETY STRUCTURE OF MOLECULAR PUMP

PROBLEM TO BE SOLVED: To provide a molecular pump having a safety structure for preventing a housing and an outside casing from being destroyed even when a rotor is damaged during operation in a turbo molecular pump and a composite molecular pump. SOLUTION: In the safety structure of the molecular p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OKAMOTO MASATOMO, IGUCHI MASASHI
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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