OPTICAL WAVEGUIDE DEVICE AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide an optical waveguide device, which can be improved in reliability and prolonged in life by making an electrode hard to deteriorate and short-circuit even when a voltage is applied to the electrode in specified environment, and its manufacturing method. SOLUTION: A va...

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Bibliographische Detailangaben
1. Verfasser:	KANBE TOSHIYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an optical waveguide device, which can be improved in reliability and prolonged in life by making an electrode hard to deteriorate and short-circuit even when a voltage is applied to the electrode in specified environment, and its manufacturing method. SOLUTION: A variable optical attenuator 100 has the electrode 12 formed between two optical waveguides 14a and 14b provided on a lithium niobate (LN) substrate 11; and an electric field is produced according to the voltage applied to the electrode 12 and the refractive index varies. The electrode 12 has an ITO thin film 31 which is provided at a specified position on the LN substrate 11 contains oxide and a chromium thin film 32 which is provided on the ITO thin film 31 and whose oxide shows acid. Oxides of ITO thin film 31 and chromium thin film 32 show both acid, so no ion outflow is caused. The electrode is free of deterioration and then no electrode short circuit is caused. COPYRIGHT: (C)2004,JPO&NCIPI