MANUFACTURING METHOD OF SUPERCONDUCTING ELEMENT

PROBLEM TO BE SOLVED: To provide a method capable of removing selectively an amorphous oxide produced on the surface of an insulating oxide thin film without affecting on a barrier layer for interface reforming type bonding. SOLUTION: The manufacturing method of a superconducting element comprises a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KATSUNO HIROSHI, YOSHIDA JIRO
Format: Patent
Sprache:eng
Schlagworte:
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