WAFER CARRYING APPARATUS

PROBLEM TO BE SOLVED: To provide a wafer carrying apparatus by decreasing the velocity of a flow of an air stream leaked from a gap of a base of an ascending/descending machine so as to suppress the disturbance of the air stream, thereby maintaining a high degree of cleanliness. SOLUTION: The wafer...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AOKI TAKASHI, MIYAGAWA HIDEKAZU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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