TURBO-MOLECULAR PUMP AND ITS ROTOR

PROBLEM TO BE SOLVED: To provide a turbo-molecular pump 1 which has sufficient absorption capability for kinetic energy emitted by a moving blade body 4 without bolting-out of the moving blade body and safety for the peripheral apparatuses even if the moving blade body 4 is broken down caused by an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TOO ATSUSHI, OKAMURA TOMOAKI
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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