HEATING ELEMENT FOR MICROFLUIDIC AND MICROMECHANICAL APPLICATIONS

PROBLEM TO BE SOLVED: To provide a small-sized improved heater using a transistor. SOLUTION: An integrated heater formed as a field effect transistor in a semiconductor substrate 12, with the transistor having source region 14 and a drain region 16 with a channel region extending therebetween to con...

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Hauptverfasser: LO PRIORE STEFANO, SANTORUVO GAETANO
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creator LO PRIORE STEFANO
SANTORUVO GAETANO
description PROBLEM TO BE SOLVED: To provide a small-sized improved heater using a transistor. SOLUTION: An integrated heater formed as a field effect transistor in a semiconductor substrate 12, with the transistor having source region 14 and a drain region 16 with a channel region extending therebetween to conduct current. The channel region has a resistance RDSwhen conducting current to generate heat above a selected threshold. A dielectric layer 24 is disposed on the channel region 20 and a gate electrode 26 is disposed on the dielectric layer to control the current of the channel region 20. A thermally insulating barrier may be formed in the semiconductor material extending about the transistor. The object 32 to be heated is positioned to receive the heat generated by the resistance RDSof the channel region 20, and the object 32 to be heated may be a fluid chamber. COPYRIGHT: (C)2004,JPO
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SOLUTION: An integrated heater formed as a field effect transistor in a semiconductor substrate 12, with the transistor having source region 14 and a drain region 16 with a channel region extending therebetween to conduct current. The channel region has a resistance RDSwhen conducting current to generate heat above a selected threshold. A dielectric layer 24 is disposed on the channel region 20 and a gate electrode 26 is disposed on the dielectric layer to control the current of the channel region 20. A thermally insulating barrier may be formed in the semiconductor material extending about the transistor. The object 32 to be heated is positioned to receive the heat generated by the resistance RDSof the channel region 20, and the object 32 to be heated may be a fluid chamber. 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subjects BASIC ELECTRIC ELEMENTS
CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY
CORRECTION OF TYPOGRAPHICAL ERRORS
ELECTRIC HEATING
ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
PRINTING
SELECTIVE PRINTING MECHANISMS
SEMICONDUCTOR DEVICES
STAMPS
THEIR RELEVANT APPARATUS
TRANSPORTING
TYPEWRITERS
title HEATING ELEMENT FOR MICROFLUIDIC AND MICROMECHANICAL APPLICATIONS
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