METAL OXIDE PHOTOCATALYTIC BODY AND MANUFACTURING METHOD THEREFOR
PROBLEM TO BE SOLVED: To provide a metal oxide photocatalytic body capable of manufacturing at a low cost and showing high photocatalytic activity, and a manufacturing method therefor. SOLUTION: Under the conditions on introducing gas containing oxygen, 12 vol.% of oxygen, 4 mTorr or more and less t...
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| creator | MORIKAWA KENJI OWAKI TAKESHI TAGA YASUNORI AOKI TSUNETAKE SUZUKI MOTOFUMI |
| description | PROBLEM TO BE SOLVED: To provide a metal oxide photocatalytic body capable of manufacturing at a low cost and showing high photocatalytic activity, and a manufacturing method therefor. SOLUTION: Under the conditions on introducing gas containing oxygen, 12 vol.% of oxygen, 4 mTorr or more and less than 10 mTorr of total pressure of the introducing gas, a metal oxide target 24 is sputtered and the metal oxide film is formed on the surface of a substrate 30. As a result, the metal oxide photocatalystic body whose substrate 30 is made of resin materials such as plastic. The metal oxide photocatalytic body has the average surface roughness from 2.5 nm or more to 1,000 nm or less, contains a crystalline metal oxide and shows the high photocatalytic activity. COPYRIGHT: (C)2004,JPO |
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| subjects | CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR RELEVANT APPARATUS TRANSPORTING |
| title | METAL OXIDE PHOTOCATALYTIC BODY AND MANUFACTURING METHOD THEREFOR |
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