CONNECTION STRUCTURE OF ELECTRODE BAR FOR FEED AND TERMINAL FOR FEED, HEATER ELEMENT, HEATING DEVICE, AND SUBSTRATE HEATING DEVICE
PROBLEM TO BE SOLVED: To provide a connection structure in which breakage of a connecting portion of an electrode bar for feed and a terminal for feed can be prevented, and an outstanding durability is obtained. SOLUTION: The connection structure of the electrode bar for feed and the terminal for fe...
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| creator | SHIBUKAWA KAZUNORI NAKAO MAKOTO MURAKAMI YOSHIHIKO WATANABE TSUYOSHI |
| description | PROBLEM TO BE SOLVED: To provide a connection structure in which breakage of a connecting portion of an electrode bar for feed and a terminal for feed can be prevented, and an outstanding durability is obtained. SOLUTION: The connection structure of the electrode bar for feed and the terminal for feed is so constituted that the electrode bar 4 for feed made from a conductive silicon carbide sintered body, of which one end is connected to a heating element, and the terminal 7 for feed is fixed by a mechanical fixing means 25 to the other end 4b of the above electrode bar 4 for feed, and further a covering layer 40 is formed on a contact surface 7d of the above terminal 7 for feed at the other end 4b of the above electrode 4 for feed. COPYRIGHT: (C)2004,JPO |
| format | Patent |
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SOLUTION: The connection structure of the electrode bar for feed and the terminal for feed is so constituted that the electrode bar 4 for feed made from a conductive silicon carbide sintered body, of which one end is connected to a heating element, and the terminal 7 for feed is fixed by a mechanical fixing means 25 to the other end 4b of the above electrode bar 4 for feed, and further a covering layer 40 is formed on a contact surface 7d of the above terminal 7 for feed at the other end 4b of the above electrode 4 for feed. 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SOLUTION: The connection structure of the electrode bar for feed and the terminal for feed is so constituted that the electrode bar 4 for feed made from a conductive silicon carbide sintered body, of which one end is connected to a heating element, and the terminal 7 for feed is fixed by a mechanical fixing means 25 to the other end 4b of the above electrode bar 4 for feed, and further a covering layer 40 is formed on a contact surface 7d of the above terminal 7 for feed at the other end 4b of the above electrode 4 for feed. COPYRIGHT: (C)2004,JPO</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | CONNECTION STRUCTURE OF ELECTRODE BAR FOR FEED AND TERMINAL FOR FEED, HEATER ELEMENT, HEATING DEVICE, AND SUBSTRATE HEATING DEVICE |
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