METHOD AND APPARATUS FOR MEASUREMENT OF SURFACE SHAPE

PROBLEM TO BE SOLVED: To provide a method and an apparatus wherein a phase shift method can be applied to a stereolattice-type moire method simply and without any trouble, without a need of the movement operation of a lattice pattern in order to change the phase of moire fringes. SOLUTION: In a ster...

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Bibliographische Detailangaben
1. Verfasser: KAMATA TERUMI
Format: Patent
Sprache:eng
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