METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To automate the detection of the projection caused by the deformation of a bump electrode. SOLUTION: In a semiconductor device manufacturing method which inspects a semiconductor device where a plurality of bump electrodes are made in planar forms on the mounting face of the se...

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Bibliographische Detailangaben
1. Verfasser: AKAIWA MASAYASU
Format: Patent
Sprache:eng
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