DEVICE FOR TREATMENT OF HALOGEN CONTAINING GAS

PROBLEM TO BE SOLVED: To provide a device for treatment of halogen containing gas, which can realize a highly efficient treatment and a device structure suitable for users' requests in a device for treatment of halogen containing gas by using an electric discharge. SOLUTION: In the device for t...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KUZUMOTO MASAKI, GOTO TOYOICHI, DOI MASAFUMI, INANAGA YASUTAKA, YOSHIDA KIYOHIKO, WADA NOBORU
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!