HOLDING DEVICE FOR CONVEYING SUBSTRATE

PROBLEM TO BE SOLVED: To provide a holding device for conveying a substrate, which does not generate powder dust and can correct the central position of the substrate, having a small and thin positioning detector which hardly generates powder dust. SOLUTION: The holding device 1 for conveying a subs...

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Bibliographische Detailangaben
1. Verfasser:	MATSUZAKI KAZUNARI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a holding device for conveying a substrate, which does not generate powder dust and can correct the central position of the substrate, having a small and thin positioning detector which hardly generates powder dust. SOLUTION: The holding device 1 for conveying a substrate, which holds the substrate W to convey it, comprises a plurality of holding claws 2, 4. At least one of these claws 2, 4 is a movable claw which pushes the substrate W to the other claw side, and the movable claw has a positioning detector 3 which can detect the moving position of the movable claw itself.