MEMBER FOR HOLDING MAGNETIC DISK SUBSTRATE, AND MAGNETIC DISK DEVICE USING THE SAME
PROBLEM TO BE SOLVED: To provide a member for holding magnetic disk substrates which can prevent foreign matters, such as abrasive powder and grinding powder which have entered the recessed part of the ceramic sintered compact surface and debonded powder, from falling and generating particles. SOLUT...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a member for holding magnetic disk substrates which can prevent foreign matters, such as abrasive powder and grinding powder which have entered the recessed part of the ceramic sintered compact surface and debonded powder, from falling and generating particles. SOLUTION: A spacer 11 serving as a member for holding magnetic disk substrates is formed of a ceramic sintered compact, and a resin film coating 13 is applied at least on its outer peripheral surface. |
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