METHOD FOR SEPARATING GALLIUM NITRIDE DEVICE ON LATTICE- MISMATCHED SUBSTRATE

PROBLEM TO BE SOLVED: To separate a GaN device on a lattice-mismatched substrate without impairing visual appearance and without damaging an electric contact or a bonding pad. SOLUTION: This method for separating a semiconductor device comprising a step of providing a substrate having one or more ep...

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Bibliographische Detailangaben

1. Verfasser:	IMLER WILLIAM R
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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