SIZE MEASURING METHOD AND DEVICE THEREOF

PROBLEM TO BE SOLVED: To provide a size measuring method and its device capable of simply performing measurement in simple device configuration. SOLUTION: At first, prescribed size data mounts a known master on a reference base 26 and its height is measured. The end face of the master is imaged by a...

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Bibliographische Detailangaben
1. Verfasser: SAWAFUJI SUSUMU
Format: Patent
Sprache:eng
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