MICROELECTRONIC COMPONENT AND METHOD FOR MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a method capable of etching a contact hole, after coating an effective hydrogen barrier using a simple method, and to provide a microelectronic constituent member. SOLUTION: A method for manufacturing the microelectronic constituent member comprises the steps of form...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SCHINDLER GUENTHER DR, HARTNER WALTER, GABRIC ZVONIMIR
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!