METHOD AND DEVICE FOR FORMATION OF MODIFIED FILM

PROBLEM TO BE SOLVED: To realize a formation method of a charging prevention film which is well consistent with a lithography process. SOLUTION: A polyamide acid film 32 is formed by a rotary coating method and then the polyamide acid film 32 is heated and the polyamide acid film 32 is converted to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ONISHI KIYONOBU, NAKASUGI TETSUO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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