METHOD FOR DETERMINING DEFECTIVE FOCUS SIZE IN X-RAY INSPECTION APPARATUS
PROBLEM TO BE SOLVED: To provide a method for determining an effective focus size that readily and objectively enables measurement of the effective focus size in an X-ray inspection apparatus, using a microfocued X-ray tube and the like. SOLUTION: First, a sample 2b, which has at least a first patte...
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| creator | YAMADA KOICHI TANIGAKI TAKESHIGE |
| description | PROBLEM TO BE SOLVED: To provide a method for determining an effective focus size that readily and objectively enables measurement of the effective focus size in an X-ray inspection apparatus, using a microfocued X-ray tube and the like. SOLUTION: First, a sample 2b, which has at least a first pattern 20 of a first line width (S1), that is located along a first direction X and a second patter 22 of a second line width (S2), that is located along a second direction Y which is orthogonal to the first direction X and is different from the first line width, is set in the X-ray inspection apparatus. Then, an enlarged image of the sample 2b on an X-ray inspection face in an X-ray image sensor is detected, and the first line width of the enlarged first pattern is set as a first line width (L1) and the second line width of the enlarged second pattern as a second line width (L2) after their enlargement respectively. Subsequently, the effective focus size (F) in an X-ray source is found from the equation (8): F=(L1.S2-L2.S1)/(L2-L1)...(8). |
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SOLUTION: First, a sample 2b, which has at least a first pattern 20 of a first line width (S1), that is located along a first direction X and a second patter 22 of a second line width (S2), that is located along a second direction Y which is orthogonal to the first direction X and is different from the first line width, is set in the X-ray inspection apparatus. Then, an enlarged image of the sample 2b on an X-ray inspection face in an X-ray image sensor is detected, and the first line width of the enlarged first pattern is set as a first line width (L1) and the second line width of the enlarged second pattern as a second line width (L2) after their enlargement respectively. Subsequently, the effective focus size (F) in an X-ray source is found from the equation (8): F=(L1.S2-L2.S1)/(L2-L1)...(8).</description><edition>7</edition><language>eng</language><subject>GAMMA RAY OR X-RAY MICROSCOPES ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; IRRADIATION DEVICES ; MEASURING ; NUCLEAR ENGINEERING ; NUCLEAR PHYSICS ; PHYSICS ; TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR ; TESTING</subject><creationdate>2002</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20020206&DB=EPODOC&CC=JP&NR=2002040199A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20020206&DB=EPODOC&CC=JP&NR=2002040199A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YAMADA KOICHI</creatorcontrib><creatorcontrib>TANIGAKI TAKESHIGE</creatorcontrib><title>METHOD FOR DETERMINING DEFECTIVE FOCUS SIZE IN X-RAY INSPECTION APPARATUS</title><description>PROBLEM TO BE SOLVED: To provide a method for determining an effective focus size that readily and objectively enables measurement of the effective focus size in an X-ray inspection apparatus, using a microfocued X-ray tube and the like. 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SOLUTION: First, a sample 2b, which has at least a first pattern 20 of a first line width (S1), that is located along a first direction X and a second patter 22 of a second line width (S2), that is located along a second direction Y which is orthogonal to the first direction X and is different from the first line width, is set in the X-ray inspection apparatus. Then, an enlarged image of the sample 2b on an X-ray inspection face in an X-ray image sensor is detected, and the first line width of the enlarged first pattern is set as a first line width (L1) and the second line width of the enlarged second pattern as a second line width (L2) after their enlargement respectively. Subsequently, the effective focus size (F) in an X-ray source is found from the equation (8): F=(L1.S2-L2.S1)/(L2-L1)...(8).</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | GAMMA RAY OR X-RAY MICROSCOPES INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES IRRADIATION DEVICES MEASURING NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR TESTING |
| title | METHOD FOR DETERMINING DEFECTIVE FOCUS SIZE IN X-RAY INSPECTION APPARATUS |
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