APPARATUS AND METHOD FOR ALIGNING SUBSTRATE

PROBLEM TO BE SOLVED: To provide a simple apparatus for aligning a substrate at a low cost capable of rapidly conducting an alignment of the substrate in X-Y direction and θ direction by using a necessary minimum limit number of sensors. SOLUTION: The apparatus for aligning the substrate comprises a...

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Bibliographische Detailangaben

1. Verfasser:	HASEGAWA TSUNEO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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