WAFER SCRUBBING BRUSH CORE

PROBLEM TO BE SOLVED: To provide a brush core for scrubbing a substrate and a method of manufacturing the same. SOLUTION: A brush core 250 is formed of a tubular core extending between a first end 253 and a second end 251. The first end has an opening into a bore that is defined through a middle of...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: DICKEY TANLIN, GARDNER DOUGLAS G, ANDERSON DONALD E, SVIRCHEVSKI JULIA S, RAVKIN MIKE, TREICHEL HELMUTH W, PASCAL ROY WINSTON
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!