FOREIGN MATTER INSPECTION APPARATUS AND METHOD FOR PROTECTING DATA IN THE APPARATUS
PROBLEM TO BE SOLVED: To provide a foreign matter inspection apparatus preventing operation setting data from being arbitrarily modified by different apparatus users and measurement data from being eliminated erroneously, and a method for protecting data in the apparatus. SOLUTION: A control part 16...
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| creator | KO MASAAKI |
| description | PROBLEM TO BE SOLVED: To provide a foreign matter inspection apparatus preventing operation setting data from being arbitrarily modified by different apparatus users and measurement data from being eliminated erroneously, and a method for protecting data in the apparatus. SOLUTION: A control part 16 such as a computer incorporated for control of the apparatus for inspecting foreign matter in the subject of inspection such as a semiconductor wafer allows an apparatus management person to preset a usable function and a password according to each apparatus user, and checks a password entered by each apparatus user against the preset password, so that only functions in the range set by the apparatus management person for each apparatus user are usable. |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING |
| title | FOREIGN MATTER INSPECTION APPARATUS AND METHOD FOR PROTECTING DATA IN THE APPARATUS |
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