SURFACE TREATING METHOD AND SURFACE TREATING DEVICE

PROBLEM TO BE SOLVED: To deposit a film excellent in adhesion on the surface of a metallic material member. SOLUTION: A gaseous substance is fed to an evacuated vessel arranged with the object to be treated to generate plasma, and with the object to be treated held under heating as a cathode, a high...

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Bibliographische Detailangaben
Hauptverfasser:	TERAKADO KAZUYOSHI, YAMAGUCHI SHIZUKA, BABA NOBORU, KAGIYAMA ARATA
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To deposit a film excellent in adhesion on the surface of a metallic material member. SOLUTION: A gaseous substance is fed to an evacuated vessel arranged with the object to be treated to generate plasma, and with the object to be treated held under heating as a cathode, a high voltage pulse is applied, by which the ions of the gas substance are impregnated into the surface of the object to be treated and are diffused into the inside to precipitate a compound by the alloy elements in the object to be treated and to form a surface hardened layer, and after that, continuously, the surface of the surface hardened layer is deposited with a film by metallic vapor from a metallic evaporation source and reaction gas.