HIGH-VOLTAGE SEMICONDUCTOR ELEMENT AND MANUFACTURING METHOD THEREFOR

PROBLEM TO BE SOLVED: To provide a high-voltage semiconductor element, using SIPOS(semi- insulating polycrystalline silicon) that improves electrical characteristics and facilitates production, and to provide its manufacturing method. SOLUTION: A semi-polysilicon film 150 is formed on a semiconducto...

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Bibliographische Detailangaben
Hauptverfasser: KIN SHOIKU, KIM TAE-HOON, KIN SHOMIN, KIN CHINKEI, KIN KEIKYOKU, SAI TETSU
Format: Patent
Sprache:eng
Schlagworte:
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