LAMINATED PIEZOELECTRIC ELEMENT AND MANUFACTURING METHOD THEREFOR

PROBLEM TO BE SOLVED: To provide a laminated piezoelectric element which enhances rigidity and dimensional accuracy of a drive plane, using simple structure. SOLUTION: A groove part 20, reaching from an upper plane to a lower plane, is formed in a part relevant to a ridge part in a lamination direct...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	IMAZU SHINJI
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
Online-Zugang:	Volltext bestellen
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