CORRECTION DATA DERIVATION METHOD FOR POSITIONING, POSITIONING DEVICE, MOUNTING DEVICE AND RECORDING MEDIUM

PROBLEM TO BE SOLVED: To lead correction vector data for eliminating the influence of a cause for deteriorating positioning precision which mechanical element parts have and to highly precisely position and mount a tool through the use of correction vector data. SOLUTION: The movement of an XY stage 1 is started with an arbitrary recognition mark 10 among recognition marks 10 on image data obtained by the image pickup of an image pickup device 8 by a correction vector data derivation means 12a, a reference grid point 11, for example, as a movement start point. Correction vector data Rxij and Ryij are obtained based on a difference between an actual arrival position and the target position when the stage reaches a target position. Correction vector data corresponding to the target position is read from a memory part 14 with respect to a command value moving the XY stage 1 to the target position by the correction means 12c. Correction vector data is added to the command value and it is given to a driving part 13.