MICROWAVE DISCHARGE DEVICE

PROBLEM TO BE SOLVED: To improve generation efficiency of microwave plasma and to provide a discharge device with low cost. SOLUTION: Microwaves flying from a microwave oscillator are intercepted in a space strangulated between a metal wave-guide rectangular tube 44 and a dielectric plate 41, in the...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	TAKAMATSU TOSHIYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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