CLEANING AGENT FOR GAS CONTAINING SILICON CHLORIDE AND METHOD FOR CLEANING

PROBLEM TO BE SOLVED: To obtain a cleaning agent having excellent purification ability for gas to be treated even when the concentration of silicon chloride in the gas is low or even when the gas is a dry gas, by using copper (II) oxide having a specified or higher BET specific surface area and a hy...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ARAKAWA CHITSU, KOURA EISEI, OTSUKA KENJI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION THEIR RELEVANT APPARATUS TRANSPORTING
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